Micromachined vibration sensor with on-chip circuitry and optical interconnects-Reference-Cited by-同舟云学术

Micromachined vibration sensor with on-chip circuitry and optical interconnects

Published:1998-06 Issue:1-3 Volume:68 Page:249-256
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Peiner E.,Fricke K.,Fehly D.,Schlachetzki A.,Hauptmann P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Condition assessment and life prediction of rolling element bearings, Part 1;Barkov;Sound Vibr.,1995

2. Condition assessment and life prediction of rolling element bearings, Part 2;Barkov;Sound Vibr.,1995

3. A low frequency micromechanical resonant vibration sensor for wear monitoring;Fritsch;Sensors and Actuators A,1997

4. A smart resonant sensor fabricated by Si MST for online vibration control of rotating machinery;Scholz,1996

5. An online vibration control system for rotating machinery based on smart sensors fabricated by Si MST;Scholz,1996

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1. Conduction mechanism of an infrared emitting diode: Impedance spectroscopy and current-voltage analysis;Semiconductors;2012-02

2. Simulation of bulk micromachined vibration sensor with low noise;SPIE Proceedings;2003-04-25

3. Condition monitoring with axle box bearings using resonant microelectromechanical sensors;Journal of Micromechanics and Microengineering;2002-06-14

4. An approach for vibration measurement based on laser frequency splitting technology;Measurement Science and Technology;2000-10-26

5. Novel high-resolution vibration sensor based on laser frequency splitting technology;SPIE Proceedings;2000-10-10