Author:
Cattan E.,Haccart T.,Vélu G.,Rémiens D.,Bergaud C.,Nicu L.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Linear motion microactuators using piezoelectric thin films;Polla;Proc. Mat. Res. Soc.,1992
2. Integrated ferroelectric microelectromechanical systems (MEMS);Polla;Int. Ferroelectrics,1995
3. K.R. Udayakumar, J. Chen, A.M. Flynn, S.F. Bart, L.S. Tavrow, D.J. Ehrlich, L.E. Cross, R.A. Brooks, Ferroelectric thin film ultrasonic micromotors, IEEE Ultrasonic Symposium Proceedings, 1991, 58.
4. Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications;Deschanvres;Sensors and Actuators A,1992
5. B. Jaffe, W.R. Cook, H. Jaffe, in Piezoelectric ceramics, Academic Press, London, 1971, pp. 18–19.
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