Efficient design and optimization of MEMS by integrating commercial simulation tools-Reference-Cited by-同舟云学术

Efficient design and optimization of MEMS by integrating commercial simulation tools

Published:1998-04 Issue:1-3 Volume:66 Page:15-20
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Nagler Oliver,Trost Michael,Hillerich Bernd,Kozlowski Frank

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Structured design methods for MEMS;Chern,1995

2. CAD for microelectromechanical systems;Senturia,1995

3. Distributed MEMS: new challenges for computation;Berlin;IEEE Comput. Sci. Eng.,1997

4. Entwurf Mechanischer Mikrosysteme — Wechselwirkungen verschiedener Felder;Dötzel;Feinwerktechnik and Mikrosystemtechnik,1995

5. CAD tools in mechanical sensor design;Puers;Sensors and Actuators,1989

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