Author:
Westberg David,Paul Oliver,Andersson Gert I.,Baltes Henry
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Anton Paar Sales Brochure, Austria, 1996.
2. P. Enoksson, G. Stemme, E. Stemme, Vibration Mode Investigation of a Resonant Silicon Tube Structure for Use as a Fluid Density Sensor, Proc. IEEE Micro Electro Mechanical Systems, Amsterdam, Netherlands, 29 Jan.–2 Feb., 1995, p. 133.
3. Fluid density sensor based on resonance vibration;Enoksson;Sensors and Actuators A,1995
4. P. Enoksson, G. Stemme, E. Stemme, Silicon Tube Structures for a Fluid Density Sensor, Tech. Digest, 8th Int. Conf. Solid-StateSensors and Actuators (Transducers '95), Stockholm, Sweden, 25–29 June, 1995, p. 540.
5. Surface micromachining by sacrificial aluminium etching;Westberg;J. Micromech. Microeng.,1996
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