Temperature dependence and drift of a thermal accelerometer-Reference-Cited by-同舟云学术

Temperature dependence and drift of a thermal accelerometer

Published:1998-04 Issue:1-3 Volume:66 Page:244-249
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Dauderstädt U.A.,Sarro P.M.,French P.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. A novel accelerometer based on a silicon thermopile;Hiratsuka,1991

2. Silicon accelerometer based on thermopiles;Dauderstädt;Sensors and Actuators A,1995

3. Simulation problems of a thermal accelerometer;Dauderstädt;Sensors and Actuators A,1996

4. Thermoelectric properties of polysilicon films doped with phosphorus and boron;Völklein;Sensors Mater.,1992

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