Author:
Serre C.,Pérez-Rodrı́guez A.,Morante J.R.,Gorostiza P.,Esteve J.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Integrated fabrication of polysilicon mechanisms;Mehregany;IEEE Trans. Electron. Dev.,1988
2. Integrated movable micromechanical structures for sensors and actuators;Fan;IEEE Trans. Electron. Dev.,1988
3. Microfabricated hinges;Pister;Sensors and Actuators A,1992
4. Stress-profile characterization and test-structure analysis of single and double ion-implanted LPCVD polycrystalline silicon;Benı́tez;Sensors and Actuators A,1996
5. G. Krötz, W. Wondrak, M. Eickhoff, V. Lauer, E. Obermeier, G. Cavalloni, New high-temperature sensors for innovative engine management, in: Detlef E. Ricken, Wolfgang Gessner (Eds.), Advanced Microsystems for Automotive Applications 98, 1998, pp. 223–230.
Cited by
52 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献