Modeling, design and testing of the electrostatic shuffle motor-Reference-Cited by-同舟云学术

Modeling, design and testing of the electrostatic shuffle motor

Published:1998-10 Issue:1-2 Volume:70 Page:171-178
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tas Niels,Wissink Jeroen,Sander Louis,Lammerink Theo,Elwenspoek Miko

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Controlled stepwise motion in polysilicon microstructures;Akiyama;J. Microelectromech. Syst.,1993

2. A walking piezo motor;Koster,1994

3. Microelectromechanical components for articulated microrobots;Yea,1995

4. Attachment/detachment electrostatic micro actuators for pan-tilt drive of a micro CCD camera;Koga,1996

5. Surface micromachined linear electrostatic stepper motor;Tas,1997

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