Author:
Boucinha M.,Chu V.,Alpuim J.P.,Conde J.P.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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3. Silicon microstructuring technology
4. Surface micromachining for microsensors and microactuators
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