Production of a quasi-travelling wave in silicon membranes with a thin deposited layer of sol—gel PZT

Author:

Biwersi S.,Gaucher P.,Hector J.,Manceau J.F.,Bastien F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Production of a quasi-travelling wave in a silicon rectangular plate using single phase drive;Manceau;IEEE Trans. UFFC,1995

2. Linear ultrasonic motor using a quasi-travelling wave in a rectangular plate;Manceau;Ultrasonics,1996

3. Ultrasonic actuators using a quasi-travelling wave in different types of plates;Biwersi,1996

4. Piezoelectric cantilever beams actuated by PZT sol—gel thin film;Luginbuhl,1995

5. Fabrication and characterization of PZT thin-film vibrators for micromotors;Muralt;Sensors Actuators A,1995

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