High-sensitivity silicon capacitive sensors for measuring medium-vacuum gas pressures-Reference-Cited by-同舟云学术

High-sensitivity silicon capacitive sensors for measuring medium-vacuum gas pressures

Published:1998-01 Issue:2 Volume:64 Page:157-164
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Catling David C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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