A study on micromachined bimetallic actuation

Author:

Zou Quanbo,Sridhar Uppili,Lin Rongming

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. H. Jerman, Electrically-activated, micromachined diaphragm valves. Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 4–7, 1990, pp. 65–69.

2. Silicon membrane micropump with integrated bimetallic actuator;Zhan;Chin. J. Electron.,1996

3. Y. Yang, Z. Zhou, X. Ye, X. Jiang, Bimetallic thermally actuated micropump, Proc. 1996 ASME International Mechanical Engineering Congress and Exposition, Atlanta, GA, USA, Nov. 17–22, 1996.

4. Q. Zou et al., Single-chip fabrication of integrated fluid system (IFS), Proc. 11th IEEE MEMS98 Workshop, Heidelberg, Germany, January, 1998.

5. Silicon as a mechanical material;Petersen;Proc. IEEE,1982

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