First integrated inductive proximity sensor with on-chip CMOS readout circuit and electrodeposited 1 mm flat coil-Reference-Cited by-同舟云学术

First integrated inductive proximity sensor with on-chip CMOS readout circuit and electrodeposited 1 mm flat coil

Published:1999-08 Issue:1-3 Volume:76 Page:273-278
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Passeraub Ph.A.,Besse P.-A.,Bayadroun A.,Hediger S.,Bernasconi E.,Popovic R.S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

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3. Y.d. Coulon, C. Bourgeois, H. de Lambilly, J. Bergqvist, F. Rudolf, Inductive Microsensor for Position and Speed, Vol. 2, 8th International Fair and Congress for Sensors, Transducers and Systems, Nurnberg, May 13–15, 1997, pp. 31–36.

4. Inductive proximity sensor with a flat coil and a new differential relaxation oscillator;Passeraub;Sensors and Actuators A,1997

5. High resolution miniaturized inductive proximity sensor: characterization and application for step motor control;Passeraub;Sensors and Actuators A,1998

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