1. H. Fujita, Recent progress in micromachining and applications to microactuators (1994), pp. 7163–7166.
2. Microflow devices and systems;Shoji;J. Micromech. Microeng.,1994
3. The case for magnetically driven microactuators;Busch-Vishniac;Sensors and Actuators A,1992
4. B. Rogge, J. Schulz, et al., Fully Batch Fabricated Magnetic Microactuators using a two layer LIGA process, The 8th International Conference Solid-State Sensors and Actuators, Stockholm, 1995, pp. 320–27.
5. B. Wagner, W. Benecke, Microfabricated actuator with moving permanent magnet, IEEE Proc. (1991), pp. 27–32.