Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps-Reference-Cited by-同舟云学术

Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps

Published:2000-02 Issue:2 Volume:79 Page:115-121
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Nguyen Nam-Trung,Meng Audra H,Black Justin,White Richard M

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

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4. Integrated flow-regulated silicon micropump;Gass et al;Sens. Actuators A,1994

5. T.S. Lammerink et al., Integrated micro-liquid dosing system, Proc. MEMS '93, pp. 254–259.

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