Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets-Reference-Cited by-同舟云学术

Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets

Published:2000-11 Issue:3 Volume:86 Page:165-170
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ohta A,Bhansali S,Kishimoto I,Umeda A

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference29 articles.

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2. The TiNi shape-memory alloy and its applications for MEMS;Kahn;J. Micromech. Microeng.,1998

3. Development of perfect shape memory effect in sputter-deposited Ti–Ni thin film;Miyazaki;Proc. IEEE Micro Electro Mech. Syst.,1994

4. Shape-memory properties in Ni–Ti sputter-deposited film;Busch;J. Appl. Phys.,1990

5. Ion sputter deposition of shape memory alloy films for microactuators;Davies;Proc. SPIE,1997

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