The silicon angular rate sensor system DAVED®-Reference-Cited by-同舟云学术

The silicon angular rate sensor system DAVED®

Published:2000-09 Issue:3 Volume:84 Page:280-284
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Geiger Wolfram,Merz Jürgen,Fischer Thomas,Folkmer Bernd,Sandmaier Hermann,Lang Walter

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. New Designs of Micromachined Vibrating Rate Gyroscopes with Decoupled Oscillation Modes;Geiger,1997

2. A New Silicon Rate Gyroscope;Geiger,1998

3. M. Illing, Micromachining Foundry Designrules, Version 1.0, Bosch Mikroelektronik.

4. A Mechanically Controlled Oscillator;Geiger,1999

5. W.C. Dunn, Rotational Vibration Gyroscope, Patent US 5 377 544, 3.1.1995.

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