Silicon micro-optical scanner-Reference-Cited by-同舟云学术

Silicon micro-optical scanner

Published:2000-05 Issue:1-3 Volume:83 Page:284-290
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Asada Norihiro,Takeuchi Masaru,Vaganov Vladimir,Belov Nickolai,in't Hout Sebastiaan,Sluchak Igor

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Silicon micromachined galvano optical scanner;Asada;IEEE Trans. Magn.,1994

2. Electrostatic combdrive-actuated micromirrors for laser beam scanning and positioning;Kiang;J. Microelectromech. Syst.,1998

3. A silicon micromechanical galvanometric scanner;Ferreira;Sens. Actuators,1999

4. Roark's Formulas for Stress and Strain;Young,1989

5. Neukermans et al., Micromachined torsional scanner, US Patent 5,629,790, 1997.

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