Author:
Castañer L,Pons J,Nadal-Guardia R,Rodrı́guez A
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Micromechanical membrane switches on silicon;Petersen;IBM J. Res. Dev.,1979
2. J. Drake, H. Jerman, B. Lutze, M. Stuber, An electrostatically actuated microrelay, in: Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducers ’95), Vol.2, Stockholm, 1995, pp. 380–383.
3. Integrated circuit compatible electrostatic polysilicon microrelays;Grétillat;J. Micromech. Microeng.,1995
4. Micromachined electromechanically tunable capacitors and their applications to RF ICs;Dee;IEEE Trans. Microwave Theor. Tech.,1988
5. J.J. Yao, M.F. Chang, A surface micromachined miniature switch for telecommunications applications with signal frequencies from dc up to 4GHz, in: Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducers ’95), Vol.2, Stockholm, 1995, pp. 384–387.
Cited by
42 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献