Author:
Yin Luzhong,Ananthasuresh G.K.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. W.-H. Chu, M. Mehregany, Microfabricated tweezers with a large gripping force and a large range of motion, in: Proceedings of the Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, June 1994, pp. 107–100.
2. H. Guckel, J. Klein, T. Christenson, K. Skrobis, M. Laudon, E.G. Lowell, Thermomagnetic metal flexure actuators, in: Proceedings of the Technical Digest of the Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 1992, pp. 73–76.
3. J. Comtois, V. Bright, in: Proceedings of the Solid-State Sensors and Actuators Workshop, Hilton Head, June 1996, pp. 174–177.
4. An electro-thermally and laterally driven polysilicon mictoactuator;Pan;J. Micromech. Microeng.,1997
5. Modelization and characterization of asymmetrical thermal microactuators;Lerch;J. Micromech. Microeng.,1996
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