Mechanical polarization modulator using micro-turbo machinery for Fourier transform infrared spectroscopy

Author:

Tanaka Shuji,Hara Motoaki,Esashi Masayoshi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. T. Ono, M. Esashi, Fabrication of infrared polarization modulator and infrared refrection absorption spectroscopy, Ext. Abstr., in: Proceedings of the 42nd Spring Meet, JSAP and Related Societies, 31a-ZC-5, Tokyo, 1995, pp. 941 (in Japanese).

2. A.H. Epstein, S.D. Senturia, O. Al-Midani, G. Anathasuresh, A. Ayon, K. Breuer, K.S. Chen, F.F. Ehrich, E. Esteve, L. Frechette, G. Gaude, R. Ghodssi, C. Groshenry, S.A. Jacobson, J.L. Kerrebrock, J.H. Lang, C.C. Lin, A. London, J. Lopata, A. Mehra, J.O. Mur Miranda, S. Nagle, D.J. Orr, E. Piecos, M.A. Schmidt, G. Shirley, S.M. Spearing, C.S. Tan, Y.S. Tzeng, I.A. Waitz, Micro-heat engines, gas turbines, and rocket engines: the MIT micro-engine project, in: Proceedings of the 28th AIAA Fluid Dynamics Conference, 4th AIAA Shear Flow Control Conference, Snowmass Village, 1997, pp. 1–12.

3. L. Frechette, S.A. Jacobson, K. Breuer, L. Frechette, R. Ghodssi, R. Khanna, C.W. Wong, X. Zhang, M.A. Schmidt, A.H. Epstein, Demonstration of a micro-fabricated high-speed turbine supported on gas bearing, in: Proceedings of the Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 2000, pp. 43–47.

4. S. Tanaka, M. Hara, M. Esashi, Air-turbine-driven micro-polarization modulator for Fourier transform infrared spectroscopy, in: Proceedings of the Technical Digest of the 17th Sensor Symposium, Kawasaki, 2000, pp. 29–32.

5. T. Kamatsuchi, T. Kato, K. Nakahashi, Numerical simulation of micro-fabrication turbine flows, in: Proceedings of the 31st JSASS Annual Meet, Tokyo, 2000, pp. 246–249 (in Japanese).

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