Author:
Oh Dong-Young,Gil Kyehwan,Chang Suk Sang,Jung Dong Kwan,Park Noh Y,Lee Seung S
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Three-dimensional microfabrication using synchrotron radiation;Ehrfeld;Nucl. Instrum. Meth. Phys. Res. A,1991
2. The LIGA technique — what are the new opportunities?;Rogner;J. Micromech. Microeng.,1992
3. Recent developments in deep X-ray lithography;Ehrfeld;J. Vac. Sci. Technol. B,1998
4. H. Lehr, W. Ehrfeld, Advanced microsturctures products by synchrotron radiation lithography, J. Phys. 4 (1994) C9-229–236.
5. T. Katoh, N. Nishi, M. Fukagawa, H. Ueno, S. Sugiyama, Direct writing for three-dimensional microfabrication using synchrotron radiation etching, in: Proceedings of the IEEE MEMS, Japan, 2000, pp. 556–561.
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