Cyclic fatigue and creep of electroformed micromachines-Reference-Cited by-同舟云学术

Cyclic fatigue and creep of electroformed micromachines

Published:2001-12 Issue:1 Volume:95 Page:61-68
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sparks Douglas R.,Chia Michael I.,Jiang George Q.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference37 articles.

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