A new vacuum friction gauge based on a Si tuning fork-Reference-Cited by-同舟云学术

A new vacuum friction gauge based on a Si tuning fork

Published:2002-04 Issue: Volume:97-98 Page:167-172
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kurth Steffen,Hiller Karla,Mehner Jan,Dötzel Wolfram,Gessner Thomas,Iwert Thomas,Biehl Steffen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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4. Damping and gas viscosity measurement using a microstructure;Andrews;Sens. Actuat. A,1995

5. Y. Zhang, S. Masoud-Ansari, G. Meng, W. Kim, N. Najafi, An ultra-sensitive, high-vacuum absolute capacitive pressure sensor, in: IEEE Proceedings of the Conference MEMS 2001, Interlaken, Switzerland, January 2001, pp. 166–169.

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