CMOS microelectromechanical bandpass filters-Reference-Cited by-同舟云学术

CMOS microelectromechanical bandpass filters

Published:2001-05 Issue:1-2 Volume:90 Page:148-152
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yang Lung-Jieh,Huang Tsung-Wei,Chang Pei-Zen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Electrostatic comb drive levitation and control method;Tang;J. Microelectromech. Syst.,1992

2. Parallel-resonator HF micromechanical bandpass filters;Clark;Transducer,1997

3. Microelectromechanical filters for signal processing;Lin;J. Microelectromech. Syst.,1998

4. VHF Free–Free Beam High-Q Micromechanical Resonators;Wang;J. Microelectromech. Syst.,2000

5. L. Lin, C.T.-C. Nguyen, R.T. Howe, A. P. Pisano, Microelectromechanical Signal Processor, US Patent 5455547 (1995).

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