Author:
Green M.L.,Sorsch T.W.,Timp G.L.,Muller D.A.,Weir B.E.,Silverman P.J.,Moccio S.V.,Kim Y.O.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. The National Technology Roadmap for Semiconductors;Semiconductor Industry Association,1997
2. IEDM Technical Digest;Timp,1998
3. Thickness dependence of boron penetration through O/sub 2/- and N/sub 2/O-grown gate oxides and its impact on threshold voltage variation
4. IEDM Technical Digest;Timp,1997
5. IEDM Technical Digest;Stathis,1998
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