Author:
Floreani F.,Koops H.W.,Elsäßer W.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference17 articles.
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5. J. Kretz, Additive Lithographie mit elektronenstrahlinduzierter Deposition, Thesis, Institut für angewandte Physik, Technische Universität Darmstadt, 1994.
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