Construction of microcolumn system and its application to nanolithography-Reference-Cited by-同舟云学术

Construction of microcolumn system and its application to nanolithography

Published:1998-03 Issue: Volume:41-42 Page:485-488
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Lee Y.J.,Kang S.H.,Kim D.H.,Park J.Y.,Choi H.J.,Kuk Y.,Chun K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Experimental evaluation of a scanning tunneling microscope-microlens system

2. Sub-40 nm resolution 1 keV scanning tunneling microscope field-emission microcolumn

3. Electron-beam microcolumns for lithography and related applications

4. Low‐voltage electron beam lithography with a scanning tunneling microscope

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1. Fabrication of Einzel Lens Array with One-Mask Reactive Ion Etching Process for Electron Micro-Optics;Japanese Journal of Applied Physics;2011-10-20

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3. Fabrication and Precise Alignment of Electron Lenses in the Microcolumn Using the Laser Diffraction Pattern;Materials Science Forum;2011-07

4. Study on the Precise Alignment of Micro-Lenses in the Microcolumn by Using the Laser Diffraction Pattern;Materials Science Forum;2007-05

5. The Assembly of a Fully Functional Microcolumn and Its STEM-Mode Operation;Journal of the Korean Physical Society;2003-11-15