Measurement capabilities of optical 3D-sensors for MST applications-Reference-Cited by-同舟云学术

Measurement capabilities of optical 3D-sensors for MST applications

Published:1998-03 Issue: Volume:41-42 Page:623-626
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Brand U.,Flügge J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Scanning white light interference microscope Prosurf of the Fraunhofer Institute of Applied Optics and Precision Mechanics, Schillerstr. 1, 07745 Jena, Germany

2. Coherence radar of Prof. Haeusler, Institute of Optics, University of Erlangen/Nuernberg, Staudtstr. 7/B2, 91058 Erlangen, Germany

3. Fringe projection instrument MacroPLAN of the Omeca Messtechnik GmbH, Warthestr. 21, 14513 Teltow, Germany

4. A kind of confocal microscope the Micro VIEW of the Omeca Messtechnik GmbH, Warthestr. 21, 14513 Teltow, Germany

5. Scanning white light interference microscope New View of the Zygo Corp., Laurel Brook Road, P.O. Box 448, Middlefield, CT 06455-0448, USA

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