Author:
Liu H.,Zhu X.,Munro E.,Rouse J.A.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Numerical algorithms for boundary problems with disturbed axial symmetry;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2004-02
2. Lithography;Nano and Giga Challenges in Microelectronics;2003
3. Simulation of electron and ion beam optics for high throughput lithography;Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)