Simulation of the dielectric constant of aerogels and estimation of their water content-Reference-Cited by-同舟云学术

Simulation of the dielectric constant of aerogels and estimation of their water content

Published:2001-03 Issue:1-4 Volume:55 Page:53-57
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Xiao X.,Streiter R.,Wolf H.,Ruan G.,Murray C.,Gessner T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Integration of Low-k Dielectric Materials Into Sub-0.25-μm Interconnects

2. Dielectric properties of aerogels

3. Surface modified spin-on xerogel films as interlayer dielectrics

4. X. Xiao et al., J. Microelectron. Eng. (in press).

5. Dielectrics;Brown,1956

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