Global space charge effect in SCALPEL-Reference-Cited by-同舟云学术

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Global space charge effect in SCALPEL

Published:2000-06 Issue:1-4 Volume:53 Page:299-302
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Mkrtchyan M.,Munro E.,Liddle J.A.,Stanton S.T.,Waskiewicz W.K.,Farrow R.C.,Katsap V.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Coulomb Interactions in particle Beams;Jansen,1990

2. Electron Optics;Klemperer,1971

3. E. Munroe, to appear in the proceedings of SPIE'99 conference on charge particle optics.

4. L. Han, W. D. Meisburger, R. F. Pease, G. I. Winograd, to appear in the proceedings of SPIE'99 conference on charge particle optics.

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Resist Requirements and Limitations for Nanoscale Electron-Beam Patterning;MRS Proceedings;2002

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