Microfabrication of diffractive optical element with continuous relief by focused ion beam-Reference-Cited by-同舟云学术

Microfabrication of diffractive optical element with continuous relief by focused ion beam

Published:2000-12 Issue:3-4 Volume:54 Page:287-293
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Fu Yongqi,Bryan Ngoi Kok Ann,Shing Ong Nan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Manufacturing by E-beam and Ion Beam,1989

2. Experimental study of submicron focused ion beam sputtering etching;Jianhua;Micromanufacturing Technology,1996

3. Fabrication of silicon microlens arrays using ion beam milling;Zhihong;Semiconductor Photonics and Technology,1996

4. Study of etching condition for photolithographic holography;Yongkang;Arct. Optic. Sinica,1992

5. Fabrication of silicon microlens arrays using ion beam milling;Zhihong;Semiconductor Photonics and Technology,1996

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