Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Image quality of higher NA i-line projection lens;Nakamura;SPIE Optical/Laser Microlithography III,1990
2. Excimer laser-based lithography: a deep ultraviolet wafer stepper;Pol;SPIE Optical Microlithography V,1986
3. Methods to print optical images at low k1 factors;Lin;SPIE Optical/Laser Microlithography III,1990
4. Step and scan: a system overview of a new lithography tool;Buckley;SPIE Optical/Laser Microlithography II,1989
5. Intrinsic birefringence in 157 nm materials;Burnett,2001
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