Author:
Jourlin Y.,Jay J.,Pigeon F.,Bouchet G.,Parriaux O.,van Dijk P.,Pellens R.,Topçu S.,Alayli Y.,Bonis M.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference2 articles.
1. G. Voirin, U. Benner, F. Clube, Y. Darbellay, O. Parriaux, S. Schneider, P. Sixt, Performance of interferometric rotation encoder using diffraction gratings, Proc. SPIE, Vol. 3099, Munich, Germany, 18–20 June 1997, pp. 166–175.
2. O. Parriaux, Y. Jourlin, F. Pigeon, G. Bouchet, P. van Dijk, R. Pellens, S. Topçu, Y. Alayli, M. Bonis, Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-Angström assessment of spatial coherence. SPIE’s International Symposium on Optical Science and Technology, Vol. 4440, San Diego, CA, 29 July–3 August 2001.
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