Deterministic Boltzmann solver for electron kinetics in plasma reactors for microelectronics applications-Reference-Cited by-同舟云学术

Deterministic Boltzmann solver for electron kinetics in plasma reactors for microelectronics applications

Published:2003-09 Issue:2-4 Volume:69 Page:606-615
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Kolobov Vladimir,Arslanbekov Robert

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

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5. Nonlocal electron kinetics in collisional gas discharge plasmas (Review);Kolobov;IEEE Trans. Plasma Sci.,1995

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