Author:
Fukushige T.,Yokoyama Y.,Hata S.,Masu K.,Shimokohbe A.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
21 articles.
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2. Investigation of on-chip integrated inductors fabricated in SOI-MUMPs for RF MEMS ICs;Analog Integrated Circuits and Signal Processing;2020-03
3. Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-05-20
4. Bulk Metallic Glass in Micro to Nano Length Scale Applications;The Nano-Micro Interface;2015-01-30
5. Thin Films on Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2015