Physical approximants to electron scattering-Reference-Cited by-同舟云学术

Physical approximants to electron scattering

Published:1997-09 Issue:2 Volume:34 Page:147-154
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Messina G.,Paoletti A.,Santangelo S.,Tucciarone A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. A single quality factor for electron backscattering from thin films;Messina;Microelectron. Engrg.,1995

2. Monte Carlo modelling of electron beam lithography: a scaling law;Messina;Microsys. Technol.,1994

3. K. Murata, Electron Beam Interactions with Solids, SEM, Inc., AMF O'Hare, Chicago, pp. 311–329

4. Energy dissipation in a thin polymer film by electron beam scattering;Hawryluk;J. Appl. Phys.,1974

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Diamond-Based Optical Waveguides, Cavities, and Other Microstructures;Optical Engineering of Diamond;2013-03-28

2. Semi-empirical derivation of the physical approximants to a-CN:H film deposition;Diamond and Related Materials;2005-08

3. Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond;MICROELECTRON ENG;2004

4. Direct imprint of sub-10 nm features into metal using diamond and SiC stamps;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004

5. Diffraction limit of the focusing waveguide grating coupler for optical probe information storage;Nanotechnology;2003-04-25