Plasma-Immersion-Implantation-Reference-Cited by-同舟云学术

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Plasma-Immersion-Implantation

Published:2016 Issue: Volume: Page:
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Container-title:Reference Module in Materials Science and Materials Engineering
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Author:

Rauschenbach B.,Torregrosa F.,Roux L.

Publisher

Elsevier

Reference45 articles.

1. Metal plasma immersion ion implantation and deposition: A review;Anders;Surf. Coating Technol.,1997

2. Plasma synthesis of metallic and composite thin films with atomically mixed substrate bonding;Brown;Nucl. Instrum. Methods B,1993

3. Plasma immersion ion implantation – a fledgling technique for semiconductor processing;Chu;Mater. Sci. Eng. R,1996

4. Plasma source ion-implantation technique for surface modification of materials;Conrad;J. Appl. Phys.,1987

5. Duchaine, J., et al., 2014. Study of AsH3 Plasma Immersion Ion Implantation using PULSION®. IIT2014 Portland, USA, Conf. Proceedings.

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