1. “VLSI Fabrication Principles.”;Ghandhi,1983
2. “Silicon Processing for the VLSI Era.”;Wolf,1986
3. “Imperfections and Impurities in Semiconductor Silicon.”;Ravi,1981
4. Gettering processes for defect control;Monkowski;Solid State Technol.,1981
5. Analysis, electrical effects, and prevention of process induced defects in silicon integrated circuits;Kolbesen,1985