Fundamentals and Applications of Plasma Cleaning-Reference-Cited by-同舟云学术

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Fundamentals and Applications of Plasma Cleaning

Published:2019 Issue: Volume: Page:289-353
ISSN:
Container-title:Developments in Surface Contamination and Cleaning: Applications of Cleaning Techniques
language:
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Author:

Thanu Dinesh P.R.,Srinadhu Endu Sekhar,Zhao Mingrui,Dole Nikhil V.,Keswani Manish

Publisher

Elsevier

Reference211 articles.

1. Atmospheric Non-Thermal Plasma Sources;Nehra;J. Eng,2008

2. New Approaches in Thermal Plasma Technology;Heberlein;Pure Appl. Chem.,2002

3. Non-Thermal Atmospheric Pressure Discharges;Fridman;J. Phys. D,2005

4. Perspectives on Thermal Plasma Modelling;Gleizes;Plasma Chem. Plasma Process,2014

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3. Optimizing impedance matching parameters for single-frequency capacitively coupled plasma via machine learning;Journal of Vacuum Science & Technology A;2023-12-22

4. Cost-effective equipment for surface pre-treatment for cleaning and excitation of substrates in semiconductor technology;SN Applied Sciences;2022-12-13

5. Recent advances and future developments in PVA brush scrubbing cleaning: A review;Materials Science in Semiconductor Processing;2022-12

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