Planar Magnetron Sputtering-Reference-Cited by-同舟云学术

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Planar Magnetron Sputtering

Published:1978 Issue: Volume: Page:131-173
ISSN:
Container-title:Thin Film Processes
language:
Short-container-title:

Author:

WAITS ROBERT K.

Publisher

Elsevier

Reference124 articles.

1. ”Handbook of Thin Film Technology”;Maissel,1970

2. S. D. Dahlgren and E. D. McClanahan, Proc. Symp. Deposition Thin Films, 3rd, Univ. Rochester p. 20 (1969);

3. S. D. Dahlgren, E. D. McClanahan, J. W. Johnston, and A. G. Graybeal, J. Vac. Sci. Technol. 7, 398 (1970).

4. F. M. Penning, Physica (Utrecht) 3, 873 (1936);

5. U.S. Patent 2,146,025 (1939).

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A review of coated nano- and micro-lattice materials;Journal of Materials Research;2021-04-19

2. Thin Coating Deposition by Magnetron Sputtering;Production, Properties, and Applications of High Temperature Coatings;2018

3. Mass Spectrometric Investigations of Nano-Size Cluster Ions Produced by High Pressure Magnetron Sputtering;Contributions to Plasma Physics;2012-09-17

4. Deposition of MgO films by pulsed mid-frequency magnetron sputtering;Applied Surface Science;2002-11

5. Thin-Film Deposition by Evaporative Condensation and Sputtering;Industrial Plasma Engineering;2001-08-25

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