Author:
MONK DAVID J.,SOANE DAVID S.
Reference130 articles.
1. “Polyimide insulators for multilevel interconnections,”;Wilson;Thin Solid Films,1981
2. Hagge, J. K. (1986–1989). Personal communication.
3. “Planarization properties of resist and polyimide coatings,”;White;J. Electrochem. Soc.,1983
4. “A novel planar multilevel interconnection technology utilizing polyimide,”;Sato;IEEE Trans. Parts, Hybrids, Pack.,1973
5. “A new transistor with two-level metal electrodes,”;Saiki;J. Electrochem. Soc.,1977
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献