Sputter Processing-Reference-Cited by-同舟云学术

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Sputter Processing

Published:2018 Issue: Volume: Page:195-230
ISSN:
Container-title:Handbook of Thin Film Deposition
language:
Short-container-title:

Author:

Simon Andrew H.

Publisher

Elsevier

Reference105 articles.

1. Physical vapor deposition of thin films;Mahan,2000

2. Handbook of physical vapor deposition (PVD) processing;Mattox,2010

3. Sputter deposition for semiconductor manufacturing;Rossnagel;IBM J Res Dev,1999

4. Thin film deposition with physical vapor deposition and related technologies;Rossnagel;J Vac Sci Technol A,2003

5. Sputtering and sputter deposition;Rossnagel,2002

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