Author:
Balasingam Jenitha Antony,Swaminathan Siddharth,Nazemi Haleh,Love Calvin,Birjis Yumna,Emadi Arezoo
Reference89 articles.
1. One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE;Abe;Sensors Actuators A Physics,2000
2. Inverted mesa-type quartz crystal resonators fabricated by deep-reactive ion etching;Abe;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2006
3. CMOS integrated gas sensor chip using SAW technology;Ahmadi;IEEE International Symposium on Circuits and Systems,2003
4. Microfabrication of piezoelectric MEMS;Baborowski;Integrated Ferroelectrics,2004
5. Why acoustic sensors?;Ballantine,1997
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