Machine Vision Techniques for Integrated Circuit Inspection-Reference-Cited by-同舟云学术

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Machine Vision Techniques for Integrated Circuit Inspection

Published:1989 Issue: Volume: Page:257-282
ISSN:
Container-title:Machine Vision for Inspection and Measurement
language:
Short-container-title:

Author:

Dom Byron

Publisher

Elsevier

Reference25 articles.

1. From VLSI to ULSI;Morgan;Semiconductor International,1984

2. Wafer Defect Detection Systems;Iscoff;Semiconductor International,1982

3. Optical Detection of Particulate Contamination on Surfaces: A Review;Lilienfeld;Areosol Sci & Tech,1986

4. Data Base Inspection of Wafer Resist Patterns;Fraser;SPIE,1985

5. Extending the Limits of Pattern Inspection Using Machine Vision;Baird;SPIE,1985

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent advances in the automatic inspection of integrated circuits for pattern defects;Machine Vision and Applications;1995-01

2. Image registration for automated inspection of printed circuit patterns using CAD reference data;Machine Vision and Applications;1993-09

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