1. Optical, electrical and structural properties of spin-on MSQ low-k dielectrics over a wide temperature range;Ahner;Microelectron. Eng.,2008
2. Plasma damage and pore sealing: increasingly coupled ULK integration challenges;Ajmera;Future. Fab. Int.,2004
3. Silicon technology leadership for the mobility era;Bohr;Intel Developers Forum,2012
4. Mechanistic study of plasma damage of low k dielectric surfaces;Bao;JVST B,2008
5. Novel k-restoring scheme for damaged ultra-low-K materials;Bohm;Microelectron. Eng.,2013