Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers

Author:

Merli P.G,Morandi V,Corticelli F

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. R.P. Feynman, Talk at the annual meeting of the American Physical Society at Caltech on December 29th 1959, published in the Caltech's Engineering and Science (February 1960 issue), in: H.D. Gilbert (Ed.), Microminiaturization, Reinhold Publishing Corporation, New York, 1961, available at http://www.zyvex.com/nanotech/feynman.html

2. Spatial resolution and energy filtering of backscattered electron images in scanning electron microscopy

3. K. Ogura, M.M. Kersker, Proceedings of the 46th EMSA Meeting, 1988, p. 204.

4. S. Franchi, P.G. Merli, A. Migliori, K. Ogura, A. Ono, Proceedings of the 12th ICEM, Vol. 1, 1990, p. 380.

5. Resolution of superlattice structures with backscattered electrons in a scanning electron microscope

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