Fabrication of 128 × 128 MEMS tunable F-P cavity optical filter array with surface micromachining-Reference-Cited by-同舟云学术

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Fabrication of 128 × 128 MEMS tunable F-P cavity optical filter array with surface micromachining

Published:2020-03 Issue: Volume:105 Page:103199
ISSN:1350-4495
Container-title:Infrared Physics & Technology
language:en
Short-container-title:Infrared Physics & Technology

Author:

Meng Qinghua,Huang Guohua,Lai Jianjun,Fan Dongxin,Zhang Kezhi

Funder

“Hundred Talents Program” of the Chinese Academy of Sciences

Key Research and Development Projects of Guangxi Science and Technology Plan

Open Project of Key Laboratory of New Electric Functional Materials of Guangxi Colleges and Universities

Publisher

Elsevier BV

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference14 articles.

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3. Modification of the ocean PHILLS hyperspectral imager for the International Space Station and the HyGEIA program;Corson;Proc. SPIE,2003

4. A system overview of the airborne visible/infrared imaging spectrometer (Aviris);Porter;Proc. SPIE,1987

5. Comparison of relative signal-to-noise ratios of different classes of imaging spectrometer;Sellar;Appl. Opt.,2005

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