A process-driven computing model for reconfigurable semiconductor manufacturing-Reference-Cited by-同舟云学术

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A process-driven computing model for reconfigurable semiconductor manufacturing

Published:2008-12 Issue:6 Volume:24 Page:709-721
ISSN:0736-5845
Container-title:Robotics and Computer-Integrated Manufacturing
language:en
Short-container-title:Robotics and Computer-Integrated Manufacturing

Author:

Qiu Robin G.,Tang Gina Y.,Joshi Sanjay B.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,General Mathematics,Software,Control and Systems Engineering

Reference25 articles.

1. ITRS. Factory integration. International technology roadmap for semiconductors, 2003 edition, 〈http://public.itrs.net/〉.

2. Park K, Park S, Ahn S. Fab layout for 300mm mass-production lines. Semiconductor FabTech. 14th ed, July 2001. p. 21–4.

3. An ITRS view on future factory integration, design, and capabilities;Pettinato;Future Fab Int,2004

4. Material logistics system analysis, design, layout, and simulation: necessary to be I3001 factory guideline compliant;Colvin;Future Fab Int,2000

5. Visionary manufacturing challenges for 2020;National Research Council,1998

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1. Reconfiguration-oriented opportunistic maintenance policy for reconfigurable manufacturing systems;Reliability Engineering & System Safety;2017-10

2. A Literature Survey on Reconfigurable Industrial Robotic Work Cells;Applied Mechanics and Materials;2015-05

3. Computational Thinking of Service Systems and Networks;Service Science;2014-08-08

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