1. 2003 International Technology roadmap for Semiconductors (ITRS), December 2003. http://public.itrs.net/
2. Chen P-H, Wu S, Lin J-S, Ko F, Wang J, Yu C-H, Liang M-S. Virtual Metrology: a Solution for Wafer to Wafer Advanced Process Control, In: Proceedings of 2005 IEEE International Symposium on Semiconductor Manufacturing, San Jose, CA, USA, pp. 155–157, September 2005.
3. A processing quality prognostics scheme for plasma sputting in TFT-LCD manufacturing;Su;IEEE Transactions on Semiconductor Manufacturing,2006
4. Intelligent prognostics system design and implementation;Su;IEEE Transactions on Semiconductor Manufacturing,2006
5. A novel virtual metrology scheme for predicting cvd thickness in semiconductor manufacturing;Hung;IEEE/ASME Transactions on Mechatronics,2007